The ozone implementation technology using high purity, ultra purity, and deep precision processes is the foundation for the implementation of this ozone generator. The CFB-ODSN series ozone generator can generate ultra-pure ozone with high concentration, high flow rate and high pressure, which can output ozone concentration up to 300mg/L, meeting the needs of the semiconductor industry. The equipment is characterized by overall modularity, compact structure, simplicity, and visual appearance.